Thin film diamond coating system and method

Khan Adam; Polak Robert; Robert Polak

Thin film diamond coating system and method

Khan Adam
, Polak Robert
, Robert Polak

AKHAN SEMICONDUCTOR INC

Research output: Other contribution

Original language	American English
State	Published - May 10 2018

Disciplines

Chemical Engineering
Materials Science and Engineering

Cite this

@misc{b835ac473dc843afb3e7119a06a14121,

title = "Thin film diamond coating system and method",

author = "Khan Adam and Polak Robert and Robert Polak",

note = "Disclosed herein is a transparent glass system that includes an optical grade silicon substrate, and a nanocrystalline diamond film on the silicon substrate, the diamond film deposited using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added.",

year = "2018",

month = may,

day = "10",

language = "American English",

type = "Other",

}

TY - GEN

T1 - Thin film diamond coating system and method

AU - Adam, Khan

AU - Robert, Polak

AU - Polak, Robert

N1 - Disclosed herein is a transparent glass system that includes an optical grade silicon substrate, and a nanocrystalline diamond film on the silicon substrate, the diamond film deposited using a chemical vapor deposition system having a reactor in which methane, hydrogen and argon source gases are added.

PY - 2018/5/10

Y1 - 2018/5/10

UR - https://lens.org/053-559-392-470-925

M3 - Other contribution

ER -

Thin film diamond coating system and method

Disciplines

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Cite this