Metal impurity-assisted formation of nanocone arrays on Si by low energy ion-beam irradiation

Kayla Steeves Lloyd; Igor L. Bolotin; Martina Schmeling; Luke Hanley; Igor V. Veryovkin

doi:10.1016/j.susc.2016.03.016

Metal impurity-assisted formation of nanocone arrays on Si by low energy ion-beam irradiation

Kayla Steeves Lloyd, Igor L. Bolotin, Martina Schmeling, Luke Hanley, Igor V. Veryovkin

Department of Chemistry and Biochemistry

University of Illinois at Chicago

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	Surface Science
Volume	652
DOIs	https://doi.org/10.1016/j.susc.2016.03.016
State	Published - Oct 1 2016

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Analytical Chemistry

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@article{bb757f8e95324af78949468d5f023e2a,

title = "Metal impurity-assisted formation of nanocone arrays on Si by low energy ion-beam irradiation",

author = "Lloyd, {Kayla Steeves} and Bolotin, {Igor L.} and Martina Schmeling and Luke Hanley and Veryovkin, {Igor V.}",

note = "Fabrication of nanocone arrays on Si surfaces was demonstrated using grazing incidence irradiation with 1keV Ar+ ions concurrently sputtering the surf...",

year = "2016",

month = oct,

day = "1",

doi = "10.1016/j.susc.2016.03.016",

language = "American English",

volume = "652",

journal = "Surface Science",

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TY - JOUR

T1 - Metal impurity-assisted formation of nanocone arrays on Si by low energy ion-beam irradiation

AU - Lloyd, Kayla Steeves

AU - Bolotin, Igor L.

AU - Schmeling, Martina

AU - Hanley, Luke

AU - Veryovkin, Igor V.

N1 - Fabrication of nanocone arrays on Si surfaces was demonstrated using grazing incidence irradiation with 1keV Ar+ ions concurrently sputtering the surf...

PY - 2016/10/1

Y1 - 2016/10/1

UR - https://www.sciencedirect.com/science/article/pii/S0039602816300139

U2 - 10.1016/j.susc.2016.03.016

DO - 10.1016/j.susc.2016.03.016

M3 - Article

VL - 652

JO - Surface Science

JF - Surface Science

ER -

Metal impurity-assisted formation of nanocone arrays on Si by low energy ion-beam irradiation

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